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Configured As Follows:
Applied Materials Centura 5200 HT
200mm
HTF Mainframe with dual narrow body loadlock
(1) RTP XE-Plus Ch C
(1) XT ploy Si CVD Ch A
(1) MCVD Ch D
(2) Single slot cool-down ch.'s on the fly center finding
ICP for poly
Multi-line gas box (add'l)
(10) gas stick ebara pumps
Scrubbers,
Area monitor
SECS
GEM SW
HWM
Controls (beta test)
(N Dichlorosilane, AE, H2, N20, Amonia, Alum, Isopropoxide, N3F, 02,
Niticoxide)
SN 208
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