The Westech Model 372 8"
Wafer Polisher is a fully automated, cassette-to-cassette precision
system. Polishing temperature, pressure and surface speed may be
controlled. The polisher can be used for conventional preparation of
substrate materials and has applications in the production of both
high-density packing systems and integrated circuits. The primary
and final polish stations combine to provide a two-step polishing
operation that maximizes throughput and quality |