|
No |
Item |
Criterion |
Judgment |
Measurement/result |
|
1 |
Keyboard operation |
Checking with Maintenance
Adjustment Utilities |
OK/NG |
OK |
|
2 |
Printer Performance |
Checking with printer Utilities |
OK/NG |
NG |
|
3 |
Displacement sensor output voltage |
0V + 0.3V at E1 camera High Mag. Focus
High |
OK/NG |
V -0.079 |
|
4 |
X/Y Morie scale Lissajous figure check |
The Lissajous figures must be circular and large |
OK/NG |
OK |
|
5 |
Fuses |
Visual check |
OK/NG |
OK |
|
6 |
X/Y guides lead screws cleaning greasing |
Renewing grease |
|
Renewed |
|
7 |
Theta lead screw cleaning greasing |
Renewing grease |
|
Renewed |
|
8 |
Other guides lead screws cleaning greasing |
Renewing grease |
|
Renewed |
|
9 |
Checking the internal DC voltage supply |
5V supply 4.90 ~ 5.25V
12V supply 10.8 ~ 13.2V
24V supply 21.6 ~ 26.4V
72V supply 73.2 ~ 82.8V |
OK/NG
OK/NG
OK/NG
OK/NG
|
4.9
12.1
23.8
72.0 |
|
10 |
Checking squareness between X and Y axis |
X deviation Y span less than
2um/200mm |
OK/NG |
Less
than 1um |
|
11 |
Checking position accuracies |
Position accuracies span
X: less than 3um/200mm
Y: less than 3um/200mm |
OK/NG
OK/NG |
OK
OK |
|
12 |
Chuck top flatness |
Different between Man/Min. at 5 points
Standard
chuck 10um
T
L C R F
|
OK/NG |
Cent.
5339 mV
Front 5334 mV
Top 5339 mV
Left 5339 mV
Right 5329 mV
|
|
13 |
Leakage current breaker performance |
Test switch can shut down the power supply to
prober |
OK/NG |
OK |
|
14 |
E1 alignment camera |
Pin to pad alignment |
OK/NG |
0um |
|
15 |
Hot chuck calibration |
30 ~ 150 deg. C |
OK/NG |
OK |
|
16 |
Reticle marker |
Alignment |
OK/Reset |
OK |
|
17 |
Theta alignment |
|
OK/NG |
OK |
|
18 |
OCR |
Wafer ID reader |
OK/NG |
OK |
|
19 |
E2 camera |
switching error |
OK/NG |
OK |
|
20 |
E1 camera |
switching error |
OK/NG |
OK |
|
21 |
Hot chuck |
30 ~ 150 |
OK/NG |
OK |
|
22 |
Wafer handling |
Turn table to Main chuck |
OK/NG |
Center |
|
23 |
Wafer handling |
Transfer from cassette to sub chuck |
OK/NG |
Center |
F02034DP
October 25,
2004
