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| 2099 Main Rd, Newfield, NJ U.S.A 08344 · 856-697-4400 · Fax: 856-697-1313 · [email protected] | |
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| Tel Mark8 Coater/Developer | ||
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JMC currently has a Tel Mark 8 Coater/Developer |
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Ref # Fab27 |
Configured As Follows: Serial Number: 824262 WaferSize: 200 Process application: DUV lithography Expose tool interface Stand Alone Wafer flow: Left to Right Coat modules: 3 total Resist: 1 module, 3 dispense Resist: 1 module, 3 dispense Resist: 1 module, 3 dispense Develop modules: 2 modules WEE unit: N/A Hotplates: 9 total HP: 6 DHP: 1 PEB: 2 Cold plates: 8 Adhesion units: 2 (HMDS) Peripheral equipment: Chemical cabinets 3 Resist: Canister HMDS: Bottle Solvent Canister Developer: Canister Temp. control units (TCU): Yes
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